Abstract

Translational temperature (<i>T</i>_<i>g</i>), rotational temperature of OH (<i>T</i>_<i>r</i>), and surface temperature (<i>T</i>_<i>s</i>) are determined in helium, argon, and oxygen plasmas. Measurements are carried out at different pressures and different flow rates as a function of microwave power input by using various methods (line broadening, pressure rise, spectroscopy, thermocouple, pyrometry). The three temperatures depend on the nature of the gas (oxygen > helium > argon) and increase with power input and pressure. Results show that <i>T</i>_<i>g</i> is of the same order of magnitude as <i>T</i>_<i>s</i>. But in all experimental conditions, <i>T</i>_<i>r</i> is always higher than <i>T</i>_<i>g</i>. Therefore, <i>T</i>_<i>r</i> is inadequate for estimating <i>T</i>_<i>g</i>. When no direct determination of <i>T</i>_<i>g</i> is available, <i>T</i>_<i>s</i> seems to give a better estimation of this important parameter.

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