Abstract
An inductively coupled plasma spectrometer was modified for gaseous sample introduction. The system uses a gas proportioner utilizing rotameters to achieve sample gas concentrations and mixing with the sample argon gas. Modifications of instruments were performed to enhance stability and compatability of gaseous sample introduction. Instrument performance was characterized for optimization of spectral signals produced from plasma gases. Spectral analyses of gaseous samples including CF<sub>4</sub>, SF<sub>6</sub>, O<sub>2</sub>, N<sub>2</sub>, air, and mixtures of CF<sub>4</sub>-O<sub>2</sub> and CF<sub>4</sub>-O<sub>2</sub>/N<sub>2</sub> were performed. Identification of plasma gas and plasma-induced by products, both atomic and molecular, were determined.
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