Abstract
The emission spectrum of the series limit of Al was used to estimate the electron number densities (<i>n<sub>e</sub></i>) in inductively coupled Ar or Ar-N<sub>2</sub> plasmas (ICP). The spectra of the series limit were recorded either with a silicon-intensified target vidicon detector or by a computer-controlled, scanning spectrometer. Background stripping was performed on the spectra recorded by both instruments to enhance signal recovery. Under comparable experimental conditions, the <i>n<sub>e</sub></i> values in the Ar-supported ICP were higher than those observed in Ar-N<sub>2</sub> plasma, when pure N<sub>2</sub> was used in the outer flow. However, the <i>n<sub>e</sub></i> value of the Ar ICP under the conditions commonly used in analytical laboratories (15 mm observation height and 1200 W forward power) was comparable to that found in pure N<sub>2</sub> outer flow, Ar-N<sub>2</sub> plasmas operated under conditions (5 mm observation height and 3000 W forward power) suitable for exciting spectral lines of high excitation energies. Whereas the use of higher, carrier gas flows tended to reduce the <i>n<sub>e</sub></i> values of the Ar ICP substantially, this trend was not observed for the pure N<sub>2</sub> outer flow Ar-N<sub>2</sub> plasma.
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