Abstract

Mass spectra have been obtained of species in the axial channel of an inductively coupled argon plasma by extracting ions from the inductively coupled plasma into a vacuum system housing a quadrupole mass spectrometer. Ionization temperatures (<i>T</i>_ion) are obtained from relative count rates of <i>m/z</i>-resolved ions according to two general types of ionization equilibrium considerations: (a) the ratio of doubly/singly charged ions of the same element, and (b) the ratio of singly charged ions from two elements of different ionization energy. The <i>T</i>_ion values derived from measurement of Ar⁺²/Ar⁺, Ba⁺²/Ba⁺, Sr⁺²/Sr⁺, and Cd⁺/I⁺ are all greater than those expected from excitation temperatures measured by other workers. The latter three values for <i>T</i>_ion are in reasonable agreement with values obtained by optical spectrometry for a variety of argon inductively coupled plasmas.

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