Raman spectroscopy of polymer films using integrated optics has been shown to be a general technique applicable to films with thicknesses as small as 1 μ. With this technique no apparent interference from spectral features due to the substrate has been observed. It has been shown that compared to a bulk sample the scattering volume in the thin film has increased by 1 to 2 orders of magnitude which results in a Raman spectrum with considerably higher signal/noise ratio.

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