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  • Applied Spectroscopy
  • Vol. 33,
  • Issue 3,
  • pp. 306-307
  • (1979)

Determination of Carbon by dc Arc Optical Emission Spectroscopy

Robert K. Lowry and Lois R. Strube

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Abstract

Quantitative application of optical emission spectroscopy (OES) to analysis of thin films as a process control tool for integrated circuit manufacturing has been reported previously.

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