Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 31,
  • Issue 1,
  • pp. 1-8
  • (1977)

Measurement of Excitation, Ionization, and Electron Temperatures and Positive Ion Concentrations in a 144 MHz Inductively Coupled Radiofrequency Plasma

Not Accessible

Your library or personal account may give you access

Abstract

Diagnostic measurements of 144 MHz radiofrequency inductively coupled plasmas at pressures between 0.5 and 14 Torr have been made. Other variables studied included the gas type (Ar or Ne) and material in plasma (Ti or Tl). Parameters measured included excitation temperatures via the atomic Boltzmann plot and the two-line method, ionization temperatures via the Saha expression, electron temperatures via double electric floating probes, and ion densities via the same electric probes. Excitation temperatures increased as the pressure of Ar or Ne plasmas decreased and reached a maximum of ~9000°K in the latter case and ~6700°K in the former case; Tl in the Ar plasma resulted in a smaller rate of decrease of excitation temperature with increase of pressure of Ar. The ionization temperatures were lower than the excitation temperatures and were similar for both the Ar and Ne plasmas. Electron temperatures were about 10 times higher than the excitation temperatures indicating non-LTE behavior. Again, the electron temperatures in Ne were considerably higher than in Ar. With the presence of metals, the electron temperatures with a metal in the Ar plasma were higher than in the absence. Positive ion concentrations were also measured for the various plasmas and were found to be similar (~10<sup>18</sup> m<sup>-3</sup>) in both the Ar and Ne plasmas. The presence of metals caused significant increase in the positive ion concentrations. From the results obtained, the optimum Ar pressure for Tl electrodeless discharge lamps operated at 144 MHz would be between 2 and 4 Torr.

PDF Article
More Like This
Laser-induced breakdown spectroscopy of aluminum plasma in the absence and presence of magnetic field

Naveed Ahmed Chishti, Shazia Bashir, Asadullah Dawood, and Muhammad Asad Khan
Appl. Opt. 58(4) 1110-1120 (2019)

Excitation and Ionization Rates of Neon Ions in a Stellarator Discharge

Einar Hinnov
J. Opt. Soc. Am. 56(9) 1179-1188 (1966)

Instability mechanism and discharge regime diagnosis of microthrusters based on plasma properties

Fangyi Wang, Shaohua Zhang, Yan Liu, and Xilong Yu
Appl. Opt. 60(4) 1021-1030 (2021)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.