Abstract
An investigation was made of the analytical capability of a Si(Li) x-ray detector for energy-dispersive techniques in the 1- to 10-keV photon energy range with multiple single channel analyzers using the electron microprobe beam as the excitation source at operating voltages of 10 to 20 kV. This system can provide rapid, accurate, simultaneous, quantitative elemental microanalysis of major constituents in complex solids for all elements heavier than Si where spectral interferences are absent and reference standards are used. Calculated theoretical detection limits are about 0.2 wt%. A relative precision of about 1 to 5% is routine for a 10- or 20-sec counting period for elements in concentrations above about 5 wt%. Data for K, L, and M x-ray spectra of representative elements ranging in energy from 1.25 to 8.64 keV are presented for operating voltages of 10, 15, and 20 kV and beam currents of 1 to 10 nA.
PDF Article
More Like This
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription