Abstract

Polarization modulation infrared ellipsometric spectra were collected on an FT-IR spectrometer, with the use of two linear polarizers and a photoelastic modulator. Samples consisted of thin poly(vinyl acetate) and poly(methyl methacrylate) films on gold substrates. The relative phase retardation (delta) and relative amplitude (psi) were derived from these measurements. These spectra were superior to those from static infrared ellipsometry measurements on the same samples. The thickness and optical constants of the films were calculated from the ellipsometric measurements and compared with reference optical constant spectra.

Calibration improvement of Fourier transform infrared phase-modulated ellipsometry

A. Canillas, E. Pascual, and E. Bertran
J. Opt. Soc. Am. A 13(12) 2461-2467 (1996)

Dual-modulator broadband infrared Mueller matrix ellipsometry

Liam J. K. Cross and Dennis K. Hore
Appl. Opt. 51(21) 5100-5110 (2012)

Application of Fourier transform infrared ellipsometry to assess the concentration of biological molecules

Enric Garcia-Caurel, Bernard Drévillon, Antonello De Martino, and Laurent Schwartz
Appl. Opt. 41(34) 7339-7345 (2002)

Broadband infrared Mueller-matrix ellipsometry for studies of structured surfaces and thin films

Andreas Furchner, Cordula Walder, Matthias Zellmeier, Jörg Rappich, and Karsten Hinrichs
Appl. Opt. 57(27) 7895-7904 (2018)

Use of optical spacers to enhance infrared Mueller ellipsometry sensitivity: application to the characterization of organic thin films

Gerald Ndong, Angel Lizana, Enric Garcia-Caurel, Valerie Paret, Géraldine Melizzi, Denis Cattelan, Bernard Pelissier, and Jean-Hervé Tortai
Appl. Opt. 55(12) 3323-3332 (2016)