Abstract

This paper reviews several applications of new instrumentation which have been developed for the electron microprobe analyzer and the scanning electron microscope. By using signal modulation techniques and phase sensitive detection, the information from the scanning electron microscope is made more quantitative. Digital techniques applied to photomultiplier outputs allow more sensitive and quantitative measurements of cathodoluminescence intensities and secondary electron emission. The technique of pulse rate analysis is used to enhance the information contained in x-ray scanning micrographs from an electron microprobe analyzer. Several examples of these techniques are discussed.

Scanning electron microscopy as a flexible technique for investigating the properties of UV-emitting nitride semiconductor thin films

C. Trager-Cowan, A. Alasmari, W. Avis, J. Bruckbauer, P. R. Edwards, B. Hourahine, S. Kraeusel, G. Kusch, R. Johnston, G. Naresh-Kumar, R. W. Martin, M. Nouf-Allehiani, E. Pascal, L. Spasevski, D. Thomson, S. Vespucci, P. J. Parbrook, M. D. Smith, J. Enslin, F. Mehnke, M. Kneissl, C. Kuhn, T. Wernicke, S. Hagedorn, A. Knauer, V. Kueller, S. Walde, M. Weyers, P.-M. Coulon, P. A. Shields, et al.
Photon. Res. 7(11) B73-B82 (2019)

Spectral Analysis Using the Electronic Scanning Spectrometer

Richard A. Harber and Gerald E. Sonnek
Appl. Opt. 5(6) 1039-1043 (1966)

Scanning Electron Microdensitometry

I. L. Kofsky, J. D. Geller, and C. S. Miller
Appl. Opt. 11(10) 2340-2346 (1972)

Techniques in Applied Electron Microscopy*

Robert D. Heidenreich
J. Opt. Soc. Am. 35(2) 139-148 (1945)

Three-dimensional analysis of urban aerosols by use of a combined lidar, scanning electron microscopy, and x-ray microanalysis

Emeric Frejafon, Jérôme Kasparian, Patrick Rambaldi, Jin Yu, Brigitte Vezin, and Jean Pierre Wolf
Appl. Opt. 37(12) 2231-2237 (1998)