Abstract

In this paper, we report a common-path, phase-shift optical microscope based on measurement of Stokes parameters ${{\rm S}_2}$ and ${{\rm S}_3}$ to extract the three-dimensional (3D) phase map of transparent objects with high precision. The microscope employs three polarizers and two identical quarter-wave plates to extract ${{\rm S}_2}$ and ${{\rm S}_3}$. The reference phase in the absence of the object is subtracted from the total phase in the presence of the object to extract the 3D phase of the object. The microscope is tested on imaging a USAF resolution test target and a reticle test pattern with excellent results. To the best of our knowledge, this is the first report of a common-path phase-shift optical microscope for 3D phase extraction based on measurement of Stokes parameters ${{\rm S}_2}$ and ${{\rm S}_3}$.

© 2020 Optical Society of America

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