Abstract

The inner diameter is one of most important parameters in the design and fabrication of monocapillary x-ray optics, which are widely used in x-ray technology. The confocal x-ray scattering method based on x-ray capillary optics was proposed to nondestructively measure the inner and outer diameters of the monocapillary. The positions of the boundaries of monocapillary x-ray optics were determined by a knife-edge scanning method, and the x-ray optics were profiled in two planes or in three-dimensional space accordingly. This confocal method could conveniently give the inner surface topography of the monocapillary optics, which can be used to show the difference between the actual inner surface and the theoretical one, and has potential applications in nondestructive measurements of stratified substances, or the profile morphology of a specific interface.

© 2019 Optical Society of America

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