Abstract
We propose to suppress acoustic wave coupling between a membrane resonator and its support structure through cascaded low-frequency resonators fabricated on the silicon substrate of the membrane. The on-chip silicon resonators are designed to ensure that the frequencies of their oscillatory motion are well separated from the mechanical modes of the membrane resonator. Using optical interferometry, we characterize the displacement response of the membrane frame with the vibration isolation; mechanical isolation from the mounting surface is achieved. Thus, we reliably fabricate membrane resonators with mechanical quality factors of around at room temperature.
© 2018 Optical Society of America
Full Article | PDF ArticleMore Like This
Yeghishe Tsaturyan, Andreas Barg, Anders Simonsen, Luis Guillermo Villanueva, Silvan Schmid, Albert Schliesser, and Eugene S. Polzik
Opt. Express 22(6) 6810-6821 (2014)
Georg Enzian, Zihua Wang, Anders Simonsen, Jonas Mathiassen, Toke Vibel, Yeghishe Tsaturyan, Alexander Tagantsev, Albert Schliesser, and Eugene S. Polzik
Opt. Express 31(8) 13040-13052 (2023)
Eric Planz, Xiang Xi, Thibault Capelle, Eric C. Langman, and Albert Schliesser
Opt. Express 31(25) 41773-41782 (2023)