Application of double metal/dielectric gratings in optical displacement detection

Mengwei Li; Hao Geng; Qiannan Wu; Rui Zhang; Yueping Han; Gao Wang

doi:10.1364/AO.57.003438

Applied Optics
Vol. 57,
Issue 13,
pp. 3438-3443
(2018)
•https://doi.org/10.1364/AO.57.003438

Application of double metal/dielectric gratings in optical displacement detection

Mengwei Li, Hao Geng, Qiannan Wu, Rui Zhang, Yueping Han, and Gao Wang

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Mengwei Li, Hao Geng, Qiannan Wu, Rui Zhang, Yueping Han, and Gao Wang, "Application of double metal/dielectric gratings in optical displacement detection," Appl. Opt. 57, 3438-3443 (2018)

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Abstract

A high-resolution displacement detection based on in-plane and out-of-plane moving gratings is discussed in this paper. To improve the detective resolution and stability, a model of a double metal/dielectric optical grating is established to investigate the tolerance of grating parameters. The zero-order optical diffraction efficiency of the grating is calculated by rigorous coupled-wavelength analysis, which depends on the grating parameters. The dependency relation curves are a cosine and pulse curve, respectively, for in-plane movement with the highest slope superior to 0.29%/nm and the highest resolution can reach to 0.01 nm, and for out-of-plane movement with the highest slope superior to 1.63%/nm and the optimum resolution can reach to 0.002 nm. These results indicate that the in-plane effect is feasible for a long-range and high-resolution displacement detection, and the out-of-plane effect is suitable for small-range and high-resolution displacement detection. Both kinds of effects provide a designed solution for the development of a high-resolution displacement sensor.

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Symbol	Parameter	Value	Tolerances
P	period of gratings	837 nm	$\pm 2 nm$
D	thickness of Au	40 nm	$\pm 10 nm$
gap	air gap between double grating	100 nm	$\pm 50 nm$
$λ$	wavelength of incident light	850 nm	negligible
$D_{SiO 2}$	thickness of silicon dioxide	500 nm	negligible
$D_{Cr}$	Chromium	5 nm	negligible

Symbol	Parameter	Value	Tolerances
$λ$	wavelength of incident light	850 nm	$\pm 10 nm$
P	period of gratings	846 nm	$\pm 4 nm$
D	thickness of Au	300 nm	$\pm 20 nm$
$D_{SiO 2}$	thickness of silicon dioxide	500 nm	negligible
$D_{Cr}$	Chromium	5 nm	negligible

Symbol	Parameter	Value	Tolerances
P	period of gratings	837 nm	$\pm 2 nm$
D	thickness of Au	40 nm	$\pm 10 nm$
gap	air gap between double grating	100 nm	$\pm 50 nm$
$λ$	wavelength of incident light	850 nm	negligible
$D_{SiO 2}$	thickness of silicon dioxide	500 nm	negligible
$D_{Cr}$	Chromium	5 nm	negligible

Symbol	Parameter	Value	Tolerances
$λ$	wavelength of incident light	850 nm	$\pm 10 nm$
P	period of gratings	846 nm	$\pm 4 nm$
D	thickness of Au	300 nm	$\pm 20 nm$
$D_{SiO 2}$	thickness of silicon dioxide	500 nm	negligible
$D_{Cr}$	Chromium	5 nm	negligible

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Equations (11)

Applied Optics