Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Cross-sectional TEM study of subsurface damage in SPDT machining of germanium optics

Not Accessible

Your library or personal account may give you access

Abstract

In addition to surface roughness and shape precision, the subsurface damage (SSD) generated by single point diamond turning (SPDT) of Ge and Si crystal optics is of increasing importance with decreasing wavelength from infrared through visible, UV, and x-ray. There are various components of SSD, e.g., microcracks, dislocations, strain, and a near-surface amorphous layer, and there are also several techniques to evaluate various components of SSD. Cross-sectional transmission electron microscopy (XTEM) is expensive and not often directly used in the optics laboratory. However, because of its very high sensitivity to SSD and down to atomic resolution, it is often used as an external service for developing SPDT technology and other surface processing techniques. It is shown in the paper that improper sample preparation can generate near-surface amorphization. Measures to avoid this artifact and a test of reliability of XTEM sample preparation are proposed.

© 2018 Optical Society of America

Full Article  |  PDF Article
More Like This
Subsurface damage in some single crystalline optical materials

Joseph A. Randi, John C. Lambropoulos, and Stephen D. Jacobs
Appl. Opt. 44(12) 2241-2249 (2005)

Practical splicing of poly-methyl-methacrylate plastic optical fibers

Michele C. Zanon, Vinicius N. H. Silva, Andrés P. L. Barbero, and Ricardo M. Ribeiro
Appl. Opt. 57(4) 812-816 (2018)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved