Cost-effective plane-grating monochromator design for extreme-ultraviolet application

Luca Poletto; Fabio Frassetto

doi:10.1364/AO.57.001202

Applied Optics
Vol. 57,
Issue 5,
pp. 1202-1211
(2018)
•https://doi.org/10.1364/AO.57.001202

Cost-effective plane-grating monochromator design for extreme-ultraviolet application

Luca Poletto and Fabio Frassetto

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Luca Poletto and Fabio Frassetto, "Cost-effective plane-grating monochromator design for extreme-ultraviolet application," Appl. Opt. 57, 1202-1211 (2018)

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Abstract

The optical design of a plane-grating monochromator mainly intended for high resolution in the extreme ultraviolet and soft x-ray is presented. The configuration has three optical elements. It uses a uniform line-spaced plane grating illuminated in the converging light coming from a focusing concave mirror and an additional plane mirror that is needed to change the grating subtended angle to keep the system in focus on a fixed slit. The parameters of the focusing mirror are determined to introduce a coma that compensates for the coma given by the grating. A monochromator for the 12–50 eV region is designed for application to high-order laser harmonics.

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*Mirror T1 and T2*	Toroidal
Incidence angle	87°
Tangential input/output arms	700 mm
Sagittal arms	700 mm/collimated (M1)
Sagittal arms	Collimated/700 mm (M2)
Illuminated area	$45 mm \times 5 mm$
Accepted angular aperture	$3 mrad \times 3 mrad$

Entrance slit	$80 μm \times 3 mm$
Mirror M1	Cylindrical
Entrance arm (slit-to-mirror distance)	1300 mm
Incidence angle	87°
Radius	23100 mm
Illuminated area	$80 mm \times 5 mm$
Gratings G1/G2	Plane
Mirror-to-grating distance	120 mm
Groove density	1200 gr/mm (G1)
Groove density	600 gr/mm (G2)
Energy range	25–50 eV (G1)
Energy range	12–25 eV (G2)
Subtended angle	138°–150°
Illuminated area	$20 mm \times 5 mm$
Grating-to-slit distance	2500 mm
Mirror M2	Plane
Grating-to-mirror distance	70–200 mm
Incidence angle	81°–87°
Illuminated area	$100 mm \times 5 mm$
Exit slit	$100 μm \times 3 mm$

*Mirror T1 and T2*	Toroidal
Incidence angle	87°
Tangential input/output arms	700 mm
Sagittal arms	700 mm/collimated (M1)
Sagittal arms	Collimated/700 mm (M2)
Illuminated area	$45 mm \times 5 mm$
Accepted angular aperture	$3 mrad \times 3 mrad$

Entrance slit	$80 μm \times 3 mm$
Mirror M1	Cylindrical
Entrance arm (slit-to-mirror distance)	1300 mm
Incidence angle	87°
Radius	23100 mm
Illuminated area	$80 mm \times 5 mm$
Gratings G1/G2	Plane
Mirror-to-grating distance	120 mm
Groove density	1200 gr/mm (G1)
Groove density	600 gr/mm (G2)
Energy range	25–50 eV (G1)
Energy range	12–25 eV (G2)
Subtended angle	138°–150°
Illuminated area	$20 mm \times 5 mm$
Grating-to-slit distance	2500 mm
Mirror M2	Plane
Grating-to-mirror distance	70–200 mm
Incidence angle	81°–87°
Illuminated area	$100 mm \times 5 mm$
Exit slit	$100 μm \times 3 mm$

Abstract

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Tables (2)

Equations (26)

Applied Optics