Abstract

The micro-grating accelerometer, as a representative micro-optical electromechanical system accelerometer, is studied widely on account of the advantages of small size and high-resolution performance. The extreme accuracy of the micro-grating accelerometer is restricted mainly by the noise floor. In order to improve the performance of the micro-grating accelerometer, a dual modulation method is proposed, which is combined with intensity modulation and phase modulation. The intensity modulation can move the signal to a high frequency, and the light source noise is suppressed perfectly by combining phase modulation. The dual modulation method is verified by constructing the micro-grating accelerometer prototype. Based on the two conditions above, the impact of $1/f$ noise is diminished. By comparison, the fluctuation of the system at 0.01 g ($1\mathrm{g}=9.8\mathrm{m}/{\mathrm{s}}^2$) is reduced by about 3 dB, which is in line with expectations. The power spectral density image shows that the system noise floor reaches $-50\mathrm{dB}$ with a decrease of about 10 dB. We hope that the low-noise micro-grating accelerometer will be used generally in the future.

© 2017 Optical Society of America

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