Abstract
To further study the microscopic mechanism and beam diameter effect during light depolarization (LDP), we developed a compact laser instrument () with an adjustable beam diameter of (approximately ). Six nickel plate samples with rms roughness, , of 42 nm to 2.3 μm (i.e., ) fabricated by the fine-honing method are examined. To analyze the beam diameter effect as applying LDP for submicron and micron evaluation, the cross-sectional beam-spot size (BSS) is adjusted from 20 μm to 650 μm during off-specular inspections. The results of BSS (i.e., ) have a 10-nm-level sensitivity, while those of BSS () have about a 100 times weaker sensitivity. It means that BSS of and should have instructional significance as applying LDP for precision levels of 10 nm and 1 μm surface roughness analyses, respectively. In addition, since the instrument is simple, portable, stable, and low-cost, it has great potential for both LDP analyses and practical online roughness testing.
© 2017 Optical Society of America
Full Article | PDF ArticleCorrections
Linsheng Liu and Kazuhiro Nonaka, "Beam diameter thresholds as applying light depolarization for effective submicron and micron root-mean-square roughness evaluation: erratum," Appl. Opt. 57, 7081-7081 (2018)https://opg.optica.org/ao/abstract.cfm?uri=ao-57-24-7081
More Like This
Linsheng Liu and Kazuhiro Nonaka
Appl. Opt. 57(24) 7081-7081 (2018)
Angela Duparré, Josep Ferre-Borrull, Stefan Gliech, Gunther Notni, Jörg Steinert, and Jean M. Bennett
Appl. Opt. 41(1) 154-171 (2002)
V. Ya. Mendeleyev and S. N. Skovorodko
Opt. Express 19(7) 6822-6828 (2011)