Abstract
High-dynamic range scatterometry enables us to use simultaneously weak scattered light and strong diffracted light for shape estimation of a diffractive optical element. Weak scattered light is especially effective in identifying the nanostructure despite being considered undesirable to diffraction efficiency and image contrast. We devised a shape estimation method based on high-dynamic range scatterometry, which is composed of modeling targets, numerical simulation of light propagation from the target, optical measurement, determination of signature region, noise reduction, data matching, and sample shape estimation. The use of the weak scattered light improved the accuracy of the shape estimation compared with using only the diffraction peaks. The shape estimation method was consistent with values measured using scanning electron microscopy.
© 2015 Optical Society of America
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