Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Shape estimation of diffractive optical elements using high-dynamic range scatterometry

Not Accessible

Your library or personal account may give you access

Abstract

High-dynamic range scatterometry enables us to use simultaneously weak scattered light and strong diffracted light for shape estimation of a diffractive optical element. Weak scattered light is especially effective in identifying the nanostructure despite being considered undesirable to diffraction efficiency and image contrast. We devised a shape estimation method based on high-dynamic range scatterometry, which is composed of modeling targets, numerical simulation of light propagation from the target, optical measurement, determination of signature region, noise reduction, data matching, and sample shape estimation. The use of the weak scattered light improved the accuracy of the shape estimation compared with using only the diffraction peaks. The shape estimation method was consistent with values measured using scanning electron microscopy.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Improved measurement accuracy in optical scatterometry using correction-based library search

Xiuguo Chen, Shiyuan Liu, Chuanwei Zhang, and Hao Jiang
Appl. Opt. 52(27) 6726-6734 (2013)

Experimental identification of a grating profile using neural network classifiers in optical scatterometry

Moustapha Godi Tchéré, Stéphane Robert, Zaki Sabit Fawzi, Bernard Bayard, Damien Jamon, and Cécile Gourgon
Appl. Opt. 60(26) 7929-7936 (2021)

Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry

Issam Gereige, Stéphane Robert, Sylvie Thiria, Fouad Badran, Gérard Granet, and Jean Jacques Rousseau
J. Opt. Soc. Am. A 25(7) 1661-1667 (2008)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved