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Optica Publishing Group

10 October 2021, Volume 60, Issue 29, pp. 8999-9253  
34 articles

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Measurement and compensation of a stitching error in a DMD-based step-stitching photolithography system

Appl. Opt. 60(29), 9074-9081 (2021)  View: HTML | PDF

3–6 µm dispersive mirrors compensating for dispersion introduced by the GaAs crystal

Appl. Opt. 60(29), 9249-9253 (2021)  View: HTML | PDF

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