10 September 2021, Volume 60, Issue 26, pp. 7849-8220
44 articles
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Cross-sectional SEM view of resist gratings, composed of a fixed resist layer deposited on a bottom anti-reflective coating, which is based on an SiO2 layer and placed on silicon substrate. For details, see Godi Tchéré et al., pp. 7929–7936.
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