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OSA Publishing

20 May 2020, Volume 59, Issue 15, pp. 4567-4756   25 articles

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Optical Design and Fabrication

Composite spiral multi-value zone plates

Appl. Opt. 59(15), 4618-4623 (2020)  View: HTML | PDF

Method for compensation selection of a microlithographic optical system

Appl. Opt. 59(15), 4692-4696 (2020)  View: HTML | PDF

Fast reconstruction of the aberrated scanning lithographic image by a quadratic imaging model and an integral transfer function

Appl. Opt. 59(15), 4708-4717 (2020)  View: HTML | PDF

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