20 July 2016, Volume 55, Issue 21, pp. 5471-5805
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Sample and detector stages of the Physikalisch-Technische Bundesanstalt's EUV-Ellipso-Scatterometer assure full variability of sample and detector orientation as needed to set the geometry for conical diffraction at a grating under blaze conditions. For details, see Marlowe et al., pp. 5548–5553.