Abstract

In employing ellipsometry to determine the complex refractive index of a reflecting surface, a small systematic error in the zero-angle positions of the polarizers is shown under certain circumstances to have a large effect on the values of the optical constants calculated. The effect of superficial optical anisotropy on ellipsometry in general, and on the zero position determination in particular, is analyzed and a test for the presence of such anisotropy presented.

© 1970 Optical Society of America

Authors’ Reply to Comments on: Azimuthal Misalignment and Surface Anisotropy as Sources of Error in Ellipsometry

M. J. Dignam and M. Moskovits
Appl. Opt. 10(3) 679-679 (1971)

Analyses and Corrections of Instrumental Errors in Ellipsometry

FRANK L. MCCRACKIN
J. Opt. Soc. Am. 60(1) 57-63 (1970)

Azimuthal alignments in ellipsometry: a high-precision method using a polarization modulator

J. Monin, H. Sahsah, A. Siblini, and O. Brevet-Philibert
Appl. Opt. 33(7) 1213-1217 (1994)

Method for azimuthal alignment in fixed-angle ellipsometry

B. J. Stagg and T. T. Charalampopoulos
Appl. Opt. 31(4) 479-484 (1992)

The Application of Intensity Transients in Ellipsometry

V. Brusic, M. A. Genshaw, and B. D. Cahan
Appl. Opt. 9(7) 1634-1638 (1970)