Abstract

Capacitive grids and similar structures, to be used as reflectors in far ir interference filters, are prepared from a 1-μ thick copper layer supported by a 2.5-μ thick dielectric film. The desired pattern is obtained by simple photolithographic contact printing of a suitable negative. The essential steps of this preparation and the generation of some relevant patterns are described.

© 1969 Optical Society of America

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References

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  1. R. Ulrich, Appl. Opt. 7, 1987 (1968).
    [CrossRef] [PubMed]
  2. R. Ulrich, Infrared Phys. 7, 65 (1967).
    [CrossRef]
  3. G. M. Ressler, K. D. Moeller, Appl. Opt. 6, 893 (1966).
    [CrossRef]
  4. W. Heimann, Physikalisch Technische Werkstaetten, Wiesbaden-Dotzheim, Germany
  5. Sumitomo Shoji, Kaisha Ltd., Osaka, Japan.
  6. Buckbee Mears Co., St. Paul, Minnesota, U. S. A.
  7. F. A. Lowenheim, Ed., Modern Electroplating (John Wiley & Sons, Inc., New York, 1963).
  8. An Introduction to Photofabrication Using KPR (Publication P-79, Eastman Kodak Company, Rochester, New York, 1966).

1968 (1)

1967 (1)

R. Ulrich, Infrared Phys. 7, 65 (1967).
[CrossRef]

1966 (1)

Heimann, W.

W. Heimann, Physikalisch Technische Werkstaetten, Wiesbaden-Dotzheim, Germany

Moeller, K. D.

Ressler, G. M.

Ulrich, R.

Appl. Opt. (2)

Infrared Phys. (1)

R. Ulrich, Infrared Phys. 7, 65 (1967).
[CrossRef]

Other (5)

W. Heimann, Physikalisch Technische Werkstaetten, Wiesbaden-Dotzheim, Germany

Sumitomo Shoji, Kaisha Ltd., Osaka, Japan.

Buckbee Mears Co., St. Paul, Minnesota, U. S. A.

F. A. Lowenheim, Ed., Modern Electroplating (John Wiley & Sons, Inc., New York, 1963).

An Introduction to Photofabrication Using KPR (Publication P-79, Eastman Kodak Company, Rochester, New York, 1966).

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Figures (4)

Fig. 1
Fig. 1

(a) For electroplating, the PTER film forms the bottom of the electrolytic cell. For a uniform current density at the cathode, the primary Cu layer is connected to the battery through six contacts along its edge (only one shown). The supporting aluminum plate also serves as a cool backing during the vacuum deposition of the primary Cu layer. (b) For the application of KPR, the Cu-coated PTER film is stretched over the edge of a spinning disk.

Fig. 2
Fig. 2

Contact printing a negative on the KPR layer. An air cushion provides the necessary intimate contact. In (a), a metal mesh serves as the negative. In (b), the negative is a photographic plate.

Fig. 3
Fig. 3

(a) The cross pattern is generated by the superposition of a pattern of capacitive squares (photographic plate) and a pattern of inductive squares (metal mesh). The capacitive pattern is shifted through 1 2 , 1 2 with respect to the inductive one. (b) The pattern resulting for the displacement vector 〈2a/g, 2a/g〉 forms half of a pattern of square rings.

Fig. 4
Fig. 4

Microphotograph of a grid of inductive crosses. The grid constant is g = 102 μ. In the bright areas, the copper has been etched away.

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