Abstract

Spectrally resolved interferometry is widely used in the measurement of distance, displacement, film thickness, and surface morphology in micro/nano-scale geometric measurement. The core of spectrally resolved white-light interferometry is phase extraction. Temporal phase shifting, Fourier transform, wavelet transform, and other methods are commonly used in phase extraction of spectrally resolved interferometry. The S-transform, providing frequency-dependent resolution and having good time–frequency characteristics, is widely used in power quality disturbance analysis, seismic wave analysis, and phase recovery in profilometry. S-transform is used to extract the phase of the spectrally resolved white-light interferometry signal measuring step height. Compared with Fourier transform and wavelet transform, it is proved that S-transform is a feasible method in phase extraction of spectrally resolved interferometry measuring step height.

© 2022 Optica Publishing Group

Full Article  |  PDF Article
More Like This
High-speed measurement of mechanical micro-deformations with an extended phase range using dual-wavelength digital holographic interferometry

Natalia Munera, Carlos Trujillo, and Jorge Garcia-Sucerquia
Appl. Opt. 61(5) B279-B286 (2022)

Multiscale windowed Fourier transform for phase extraction of fringe patterns

Jingang Zhong and Huiping Zeng
Appl. Opt. 46(14) 2670-2675 (2007)

Transformer oil quality evaluation using quantitative phase microscopy

Xinyi Xing, Lin Zhu, Chao Chen, Nan Sun, Chuankai Yang, Keding Yan, Liang Xue, and Shouyu Wang
Appl. Opt. 61(2) 422-428 (2022)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Data Availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription