Abstract

Quantum optical lithography, a diffraction-unlimited method, was applied to pattern monolayer graphene at 10 nm resolution. In our tests with chemical vapor deposition monolayer graphene samples, we have succeeded in producing flat surfaces of a sandwich of monolayer graphene-resist on Si, ${{\rm{Si}}_3}{{\rm{N}}_4}$, or glass substrates. Complex patterns have been written on monolayer graphene samples by a nanoablation process. The method could be used to realize monolayer graphene nanodevices.

© 2021 Optical Society of America

Full Article  |  PDF Article
More Like This
Mid-infrared electro-optic modulator based on a graphene-embedded plasmonic rib waveguide with ultrahigh electro-optic wavelength tuning

Chenyang Hou, Tao Ma, Jinhui Gao, Heng Liu, and Fang Wang
Appl. Opt. 60(10) 2795-2802 (2021)

Enhanced photolithography with Al film insertion for large-scale patterning of CVD graphene

Zhangfu Chen, Yiru Li, Bo Wang, Bin Wei, and Lianqiao Yang
Opt. Mater. Express 8(8) 2403-2414 (2018)

Enhanced linear absorption coefficient of in-plane monolayer graphene on a silicon microring resonator

Heng Cai, Yahui Cheng, He Zhang, Qingzhong Huang, Jinsong Xia, Regis Barille, and Yi Wang
Opt. Express 24(21) 24105-24116 (2016)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Data Availability

No data were generated or analyzed in the presented research.

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription