Abstract

Phase imaging is an important measurement method in optical metrology, and phase extraction is one of its essential components. A method using one-frame dual-wavelength interferometry (DWI) for fast phase extraction is proposed. Using this method, the Hilbert transform (HT) is applied twice to a wavelength-multiplexed interferogram to obtain two images. The HT is then applied twice to the sum of the squares of these two images. The synthetic wavelength phase can then be obtained. Compared with other common multiple-frame DWI methods, the proposed approach requires only one multiplexed interferogram and does not have to consider parameter changes in interferograms of different frames. Furthermore, the proposed method was determined to require the least calculation time, and the simulation and experimental results confirmed its high accuracy and efficiency. It suggests that the proposed method is suitable for real-time measurements.

© 2021 Optical Society of America

Full Article  |  PDF Article
More Like This
Dual-wavelength interferometry based on the spatial carrier-frequency phase-shifting method

Linbo Huang, Xiaoxu Lu, Yunfei Zhou, Jindong Tian, and Liyun Zhong
Appl. Opt. 55(9) 2363-2369 (2016)

Single-wavelength phase retrieval method from simultaneous multi-wavelength in-line phase-shifting interferograms

Leihuan Fei, Xiaoxu Lu, Haling Wang, Wangping Zhang, Jindong Tian, and Liyun Zhong
Opt. Express 22(25) 30910-30923 (2014)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription