Abstract

An off-axis rotation absolute measurement method by regarding random shift-rotation movement as off-axis rotation is proposed. The off-axis rotation center is calculated by matching feature points on the measured surface. Then the surface profile is calculated relying on Zernike polynomial fitting. Multiple rotations are carried out to reduce symmetrical and environment errors. $N(N - {1}){/2}$ results can be collected after $ N $ times rotation. Compared to traditional methods, this method can obtain accurate results with high efficiency and does not need high precision positioning.

© 2021 Optical Society of America

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