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Single-sequence stable spectroscopic reflectometry using simultaneous measurement of incident light and reflected light

Sin Yong Lee, Seung Woo Lee, Garam Choi, Yeongchan Cho, and Heui Jae Pahk

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Abstract

We proposed a new scheme of spectroscopic reflectometry (SR) that improves the stability with respect to the intensity variations of the incident light and simplifies the measurement procedure. The proposed method enables this by simultaneously measuring the incident light and the reflected light. Using the multi-order retarder, we modulate the incident light intensity into a high-frequency signal at the spectral domain. Even though the spectrometer measures the sum of reflected light and modulated incident light, each signal can be separately obtained using the Fourier transform. The proposed method is verified through the measurement of ${{\rm SiO}_{2}}$ thin film on the Si substrate with various incident light intensities.

© 2021 Optical Society of America

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Corrections

Sin Yong Lee, Seung Woo Lee, Garam Choi, Yeongchan Cho, and Heui Jae Pahk, "Single-sequence stable spectroscopic reflectometry using simultaneous measurement of incident light and reflected light: publisher’s note," Appl. Opt. 60, 9231-9231 (2021)
https://opg.optica.org/ao/abstract.cfm?uri=ao-60-29-9231

29 September 2021: Corrections were made to Eqs. (7) and (9).

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Equations (13)

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