Abstract

Glass products with high joint strength are highly demanded in the field of microelectromechanical system (MEMS). While the quality requirement of MEMS is getting higher and higher, much attention has been paid to further improving the welding strength of the glass. Herein, a femtosecond laser welding method assisted by silver nanofilm for quartz glass is proposed. To optimize the welding results, the influence of the laser power on the location of the heat-affected zone is studied. The effect of coated silver nanofilm at the interface of two glass substrates on femtosecond laser absorptivity is conducted. Also, the welding spot size under different irradiation periods is investigated. In addition, the welding strength with and without the silver nanofilm is measured and compared. It is demonstrated that the welding strength was increased nearly 20% on average by our proposed method compared with direct femtosecond laser welding. In addition, even at the lower laser power than the welding threshold, the welding process could be realized by the proposed method.

© 2021 Optical Society of America

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