Abstract

A spectroscopic Mueller matrix ellipsometer based on two rotating Fresnel rhomb compensators with a nearly achromatic response and optimal retardance is described. In this instrument, the compensators rotate in a discrete manner instead of continuously rotating, and this allows for a well-conditioned measurement even for low intensity samples. Moreover, in this configuration, the exposure time of the CCD detector can be varied within orders of magnitude without interfering with the dynamics of the compensator rotation. An optimization algorithm determines the optimal set of discrete angles that allows the determination of the Mueller matrix in the presence of noise. The calibration of the instrument is discussed, and examples of experimentally determined Mueller matrices are provided.

© 2021 Optical Society of America

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References

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Supplementary Material (2)

NameDescription
Dataset 1       List of discrete angles for PSG. Each column corresponds to a different number of angles, N (N=16 in the first column and N=100 in the last column). Unused rows (when the row number exceeds N) are filled with "0".
Dataset 2       List of discrete angles for PSA. Each column corresponds to a different number of angles, N (N=16 in the first column and N=100 in the last column). Unused rows (when the row number exceeds N) are filled with "0".

Data Availability

Data underlying the results presented in this paper are available in Dataset 1, Ref. [27] and Dataset 2, Ref. [28].

27. S. Bian, C. Cui, and O. Arteaga, “List of discrete angles for the PSG,” figshare, 2021, https://doi.org/10.6084/m9.figshare.14346500.

28. S. Bian, C. Cui, and O. Arteaga, “List of discrete angles for the PSA,” figshare, 2021, https://doi.org/10.6084/m9.figshare.14346503.

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Figures (8)

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Equations (22)

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