Dielectric function of vanadium oxide thin films by thermal annealing

Adolf Canillas; Frank Güell; Oriol Arteaga; Paulina R. Martínez-Alanis; Michel Vergnat; Hervé Rinnert; Blas Garrido

doi:10.1364/AO.420476

Applied Optics
Vol. 60,
Issue 15,
pp. 4477-4484
(2021)
•https://doi.org/10.1364/AO.420476

Dielectric function of vanadium oxide thin films by thermal annealing

Adolf Canillas, Frank Güell, Oriol Arteaga, Paulina R. Martínez-Alanis, Michel Vergnat, Hervé Rinnert, and Blas Garrido

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Adolf Canillas, Frank Güell, Oriol Arteaga, Paulina R. Martínez-Alanis, Michel Vergnat, Hervé Rinnert, and Blas Garrido, "Dielectric function of vanadium oxide thin films by thermal annealing," Appl. Opt. 60, 4477-4484 (2021)

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Abstract

The dielectric function of ${{\rm{VO}}_x}$ and ${{\rm{V}}_2}{{\rm{O}}_5}$ thin films is determined with the use of a spectroscopic Mueller matrix ellipsometer from 1.5 to 5.0 eV. The complex dielectric function of the films is calculated using the measured Mueller matrices filtered with the Cloude decomposition. ${{\rm{VO}}_x}$ shows high absorption in the UV region, a Tauc–Lorentz gap around 2.4 eV, and non-vanishing absorption in the visible. ${{\rm{V}}_2}{{\rm{O}}_5}$ shows a high absorption band centered at 2.87 eV, an indirect optical band gap at 1.95 eV, and a direct optical band gap at 2.33 eV. The ellipsometric characterization is supported by Raman, x-ray photoelectron, and photoluminescence spectroscopy.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Sample	Raman Shift ( ${c m}^{- 1}$ )	FWHM ( ${c m}^{- 1}$ )
A	$142.8 \pm 0.3$	$13.5 \pm 0.2$
B	$143.6 \pm 0.2$	$17.8 \pm 0.3$
C	$145.0 \pm 0.1$	$7.4 \pm 0.1$

	$V 2 p_{3 / 2}$			$V 2 p_{1 / 2}$		O1s
Sample	BE (eV)	FWHM A% (eV)		A%	Core line	A% Compound
A	516.1	1.2	7.7	3.8	$V^{4 +}$	47.7	${V O}_{X}$
	517.3	1.2	27.0	13.5	$V^{5 +}$
B	516.1	1.2	4.9	2.5	$V^{4 +}$	48.1	${V O}_{X}$
	517.4	1.3	29.9	14.5	$V^{5 +}$
C	516.0	0.8	3.0	1.5	$V^{4 +}$	49.4	$V_{2} O_{5}$
	517.2	1.0	30.0	14.9	$V^{5 +}$

Sample	A	B	C
$χ^{2}$	0.96	1.6	7.2
$d_{r}$ (nm)	$4.187 \pm 0.07$	$6, 6 \pm 0.1$	$35, 2 \pm 0.1$
$d_{1}$ (nm)	$331.7 \pm 0.5$	$344.2 \pm 0.3$	$253.9 \pm 0.4$
$ε_{\infty}$	$1.6 \pm 0.2$	$1.9 \pm 0.1$	$1.93 \pm 0.03$
$E_{G}$ (eV)	$2.37 \pm 0.02$	$2.43 \pm 0.01$	$1.39 \pm 0.01$
$E_{0}$ (eV)	$3.50 \pm 0.02$	$3.41 \pm 0.01$	$3.020 \pm 0.002$
$A_{L}$	$51 \pm 3$	$35 \pm 1$	$14.7 \pm 0.2$
C (eV)	$2.7 \pm 0.1$	$1.83 \pm 0.03$	$0.793 \pm 0.004$
$E_{1}$ (eV)	$1.9 \pm 0.1$	$1.76 \pm 0.09$	$5.53 \pm 0.03$
$γ_{1}$ (eV)	$1.5 \pm 0.5$	$3.0 \pm 0.5$	$0.44 \pm 0.06$
$f_{1}$	$0.09 \pm 0.05$	$0.58 \pm 0.07$	$0.54 \pm 0.03$
$E_{2}$ (eV)	$7.8 \pm 0.8$	$6.9 \pm 0.3$	$4.528 \pm 0.007$
$γ_{2}$ (eV)	$3.1 \pm 0.7$	$3.0 \pm 0.4$	$1.45 \pm 0.01$
$f_{2}$	$1.5 \pm 0.3$	$1.2 \pm 0.1$	$1.26 \pm 0.02$

Model	TL + 3LOs	2TL + 2LOs
$χ^{2}$	4.4	1.3
$d_{r}$ (nm)	$32.0 \pm 02$	$31.2 \pm 042$
$d_{1}$ (nm)	$264.7 \pm 0.7$	$265.1 \pm 0.8$
$ε_{\infty}$	$1.69 \pm 0.08$	$1.59 \pm 0.06$
$E_{G}$ (eV)	$1.92 \pm 0.03$	$2.55 \pm 0.01$
$E_{01}$ (eV)	$3.010 \pm 0.003$	$2.875 \pm 0.007$
$A_{L 1}$	$23 \pm 1$	$148 \pm 9$
$C_{1}$ (eV)	$0.619 \pm 0.05$	$0.50 \pm 0.01$
$E_{02}$ (eV)	–	$4.41 \pm 0.02$
$A_{L 2}$	–	$8.0 \pm 0.9$
$C_{2}$ (eV)	–	$0.80 \pm 0.06$
$E_{1}$ (eV)	$2.467 \pm 0.008$	$2.541 \pm 0.003$
$γ_{1}$ (eV)	$0.31 \pm 0.02$	$0.393 \pm 0.007$
$f_{1}$	$0.091 \pm 0.009$	$0.250 \pm 0.006$
$E_{2}$ (eV)	$4.57 \pm 0.03$	$6.0 \pm 0.1$
$γ_{2}$ (eV)	$1.75 \pm 0.06$	$2.8 \pm 0.1$
$f_{2}$	$1.4 \pm 0.1$	$1.46 \pm 0.05$
$E_{3}$ (eV)	$5.9 \pm 0.1$	–
$γ_{3}$ (eV)	$0.9 \pm 0.3$	–
$f_{3}$	$0.7 \pm 0.1$	–

Sample	Raman Shift ( ${c m}^{- 1}$ )	FWHM ( ${c m}^{- 1}$ )
A	$142.8 \pm 0.3$	$13.5 \pm 0.2$
B	$143.6 \pm 0.2$	$17.8 \pm 0.3$
C	$145.0 \pm 0.1$	$7.4 \pm 0.1$

Abstract

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Applied Optics