Abstract

We demonstrate a Fourier-transform-based method for extensive-dynamic-range and high-resolution surface profiling using phase-sensitive spectral-domain white-light interferometry. By combining the frequency and phase of interference fringes, this method is capable of displacement measurement with nanometer-scale resolution and a dynamic range up to several millimeters. The performance of the method is demonstrated by surface profiling of a coin, gauge blocks, and a cell-phone circuit board.

© 2021 Optical Society of America

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