Characterization of a chromatic confocal displacement sensor integrated with an optical laser head

A. Zakrzewski; P. Jurewicz; P. Koruba; M. Ćwikła; J. Reiner

doi:10.1364/AO.421382

Applied Optics
Vol. 60,
Issue 11,
pp. 3232-3241
(2021)
•https://doi.org/10.1364/AO.421382

Characterization of a chromatic confocal displacement sensor integrated with an optical laser head

A. Zakrzewski, P. Jurewicz, P. Koruba, M. Ćwikła, and J. Reiner

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A. Zakrzewski, P. Jurewicz, P. Koruba, M. Ćwikła, and J. Reiner, "Characterization of a chromatic confocal displacement sensor integrated with an optical laser head," Appl. Opt. 60, 3232-3241 (2021)

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Table of Contents Category
- Optical Devices, Sensors, and Detectors
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About this Article
History
- Original Manuscript: February 2, 2021
- Revised Manuscript: March 16, 2021
- Manuscript Accepted: March 17, 2021
- Published: April 9, 2021

Abstract

In this paper, the results of experimental characterization of an optical system consisting of a chromatic confocal displacement sensor integrated with an optical laser head are presented. As a result of integration, the part of the optical path of the displacement sensor was combined with the optical path of the laser beam. Consequently, a working distance of 250 mm for the optical system was achieved. The main aim of the characterization was to determine the calibration curve, as well as the application parameters of the system. The methodology for spectral data processing with particular emphasis on the effectiveness of various extraction algorithms is presented. The Lorentzian fitting was considered as the optimal algorithm for the optical system. Consequently, a large measuring range of 10 mm was obtained with perfect linear tendency of the calibration curve. The optical system was characterized by high accuracy equal to $\pm {0.11}\%$ of the measuring range, as well as 1 µm resolution. Moreover, the functionality of the system was verified on materials commonly used in laser processing and additive manufacturing. Finally, the system was validated through a comparative measurement with a laser profiler.

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Supplementary Material (1)

Name	Description
Supplement 1	Surface parameters of selected materials.

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Parameter	Arg Max			Gauss			Lorentz/Voigt
Measuring range [mm]	10	20	50	10	20	50	10	20	50
Trueness [mm]	0.081	0.200	0.943	0.022	0.139	0.913	0.009	0.147	0.921
Precision [mm]	0.022			0.003			0.002
Accuracy [% of measuring range]	$\pm 1.04$	$\pm 1.11$	$\pm 1.93$	$\pm 0.25$	$\pm 0.71$	$\pm 1.83$	$\pm 0.11$	$\pm 0.74$	$\pm 1.84$
Resolution [mm]	0.004			0.001			0.001
Linearity ( $R^{2}$ )	0.99977	0.99981	0.99914	0.99999	0.99991	0.99913	1	0.99989	0.99912

Parameter	Arg Max			Gauss			Lorentz/Voigt
Measuring range [mm]	10	20	50	10	20	50	10	20	50
Trueness [mm]	0.087	0.102	0.922	0.048	0.051	0.774	0.041	0.052	0.793
Precision [mm]	0.025			0.004			0.003
Accuracy [% of measuring range]	$\pm 1.13$	$\pm 1.06$	$\pm 1.89$	$\pm 0.52$	$\pm 0.27$	$\pm 1.55$	$\pm 0.44$	$\pm 0.14$	$\pm 1.56$
Resolution [mm]	0.005			0.002			0.001
Linearity ( $R^{2}$ )	0.99970	0.99990	0.99959	0.9999	0.99996	0.99964	0.99993	0.99997	0.99965

Method	Extraction Algorithm	Measuring Range [mm]	Accuracy [% of Measuring Range]	Resolution [µm]	Linearity ( $R^{2}$ )	References
Developed optical system	Lorentzian fitting	10.000	$\pm 0.11$	1.000	1	–
Stand-alone chromatic confocal sensor	Gaussian fitting	0.600	–	0.100	0.99993	[21]
	Center of mass	0.040	–	0.030	1	[22]
	Center of mass/Gaussian fitting	1.050	$\pm 0.20$	1.000	1	[23]
	–	0.030	–	0.010	–	[24]
	Corrected parabolic fitting	0.020	$\pm 0.01$	0.001	–	[25]
	Hybrid radial basis function network	0.400	$\pm 0.11$	0.007	–	[26]
Triangulation	Gaussian fitting	20.000	–	270	0.99	[13]
CCD camera	–	7.000	–	20	–	[14]
Structured light 3D scanning	–	60.000	$\pm 0.12$	–	–	[15]
Low coherence interference	Percentile calculation in a mobile window frame	10.000	$\pm 0.50$	–	–	[16]]

Parameter	Arg Max			Gauss			Lorentz/Voigt
Measuring range [mm]	10	20	50	10	20	50	10	20	50
Trueness [mm]	0.081	0.200	0.943	0.022	0.139	0.913	0.009	0.147	0.921
Precision [mm]	0.022			0.003			0.002
Accuracy [% of measuring range]	$\pm 1.04$	$\pm 1.11$	$\pm 1.93$	$\pm 0.25$	$\pm 0.71$	$\pm 1.83$	$\pm 0.11$	$\pm 0.74$	$\pm 1.84$
Resolution [mm]	0.004			0.001			0.001
Linearity ( $R^{2}$ )	0.99977	0.99981	0.99914	0.99999	0.99991	0.99913	1	0.99989	0.99912

Parameter	Arg Max			Gauss			Lorentz/Voigt
Measuring range [mm]	10	20	50	10	20	50	10	20	50
Trueness [mm]	0.087	0.102	0.922	0.048	0.051	0.774	0.041	0.052	0.793
Precision [mm]	0.025			0.004			0.003
Accuracy [% of measuring range]	$\pm 1.13$	$\pm 1.06$	$\pm 1.89$	$\pm 0.52$	$\pm 0.27$	$\pm 1.55$	$\pm 0.44$	$\pm 0.14$	$\pm 1.56$
Resolution [mm]	0.005			0.002			0.001
Linearity ( $R^{2}$ )	0.99970	0.99990	0.99959	0.9999	0.99996	0.99964	0.99993	0.99997	0.99965

Abstract

Supplementary Material (1)

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Equations (3)

Applied Optics