Abstract
Optical properties of low-temperature pulsed DC-sputter deposited ($ {\le} {70° {\rm C}}$) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.
© 2020 Optical Society of America
Full Article | PDF ArticleMore Like This
Hsi-Chao Chen, Der-Jun Jan, Yu-Siang Luo, and Kuo-Ting Huang
Appl. Opt. 53(4) A321-A329 (2014)
Bo-Huei Liao, Chien-Nan Hsiao, Ming-Hua Shiao, and Sheng-Hui Chen
Appl. Opt. 59(5) A176-A180 (2020)
Carlos R. A. Lima, Leandro L. Soares, Lucila Cescato, Marco A. R. Alves, and Edmundo S. Braga
Opt. Lett. 22(23) 1805-1807 (1997)