Abstract

As an angle measuring instrument, the traditional autocollimator has the ability to measure the two-degree-of-freedom angles, namely, pitch and yaw, but fails to measure the roll angle. In this study, we propose a novel autocollimator that can simultaneously measure the three-degree-of-freedom (3-DOF) angles. As a key component, a combined target reflector (CTR) is meticulously designed to split the collimated laser beam into two beams. The 3-DOF angle measurement is achieved by sensing the displacements of the two beam spots reflected from the CTR. The measurement principle and simulation analysis are presented in detail. Experiments are conducted to assess the performance of the proposed autocollimator, and the results indicate that it has an accuracy of better than 0.74 arcsec over a range of ${ \pm 200}\,\,{\rm arcsec}$, and it can be used for 3-DOF angular motion error measurement of a precision displacement stage.

© 2020 Optical Society of America

Full Article  |  PDF Article
More Like This
Design, fabrication, and verification of a three-dimensional autocollimator

Yanhe Yin, Sheng Cai, and Yanfeng Qiao
Appl. Opt. 55(35) 9986-9991 (2016)

Five-degrees-of-freedom measurement system based on a monolithic prism and phase-sensitive detection technique

Pei Huang, Yan Li, Haoyun Wei, Libing Ren, and Shijie Zhao
Appl. Opt. 52(26) 6607-6615 (2013)

Three-degree-of-freedom displacement measurement using grating-based heterodyne interferometry

Hung-Lin Hsieh and Ssu-Wen Pan
Appl. Opt. 52(27) 6840-6848 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (15)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription