Abstract

We demonstrate a uniaxial 3D profilometry system illuminating the sample with a linear polarization pattern and measuring a polarization camera. The linear polarization pattern is generated by a spatial light modulator and a quarter-wave plate in the optical system. The system can measure four different fringe patterns with a phase difference of 90 deg simultaneously in the polarization camera. Therefore, we can measure three-dimensional shapes in a single shot. We present the measurement principles of the system and show the results of a real-time 3D profilometry experiment.

© 2020 Optical Society of America

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Supplementary Material (1)

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» Visualization 1       Results of the real-time 3D profile measurements of the step sample (Figure 8).

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Equations (11)

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