Diffraction efficiency evaluation for diamond turning of harmonic diffractive optical elements

Peng Zhou; Changxi Xue; Chao Yang; Chang Liu; Xingguo Liu

doi:10.1364/AO.376978

Applied Optics
Vol. 59,
Issue 6,
pp. 1537-1544
(2020)
•https://doi.org/10.1364/AO.376978

Diffraction efficiency evaluation for diamond turning of harmonic diffractive optical elements

Peng Zhou, Changxi Xue, Chao Yang, Chang Liu, and Xingguo Liu

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Peng Zhou, Changxi Xue, Chao Yang, Chang Liu, and Xingguo Liu, "Diffraction efficiency evaluation for diamond turning of harmonic diffractive optical elements," Appl. Opt. 59, 1537-1544 (2020)

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Table of Contents Category
- Optical Design and Fabrication
Optics & Photonics Topics
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The topics in this list come from the Optics and Photonics Topics applied to this article.

About this Article
History
- Original Manuscript: September 3, 2019
- Revised Manuscript: November 3, 2019
- Manuscript Accepted: January 9, 2020
- Published: February 11, 2020

Abstract

Single point diamond turning is a commonly used method for manufacturing harmonic diffractive optical elements (HDOEs). Diffraction efficiency of HDOEs is sensitive to surface-relief profile errors, and a half-round tool can reduce the profile error obviously. Furthermore, the diamond tools also create surface roughness errors. The two errors will produce shadowing and scattering effects. In this paper, the two kinds of errors, especially the surface roughness, are described accurately. A mathematical model is proposed to reveal the relationship among diffraction efficiency, cutting tool radius, feed rate, microstructure zone period widths, and the refractive index of the substrate material and balance the influence of shadowing and scattering effects. The simulation results show that the model can guide the acquisition of high-precision surface topography and high diffraction efficiency, which improves the imaging quality of the optical system.

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		$T = 100 µ m (p = 10) /$ $T = 200 µ m (p = 20)$		$T = 200 µ m (p = 10) /$ $T = 400 µ m (p = 20)$		$T = 300 µ m (p = 10) /$ $T = 600 µ m (p = 20)$
Material	$f (µ m / r)$	$R_{T} (µ m)$	$η_{max} (%)$	$R_{T} (µ m)$	$η_{max} (%)$	$R_{T} (µ m)$	$η_{max} (%)$
PMMA	0.5	10/9	89.83/89.9	24/24	95.88/95.89	39/39	97.58/97.58
	1	14/15	76.55/76.62	36/36	90/90.02	62/62	94.04/94.05
	1.5	19/19	63.37/63.44	48/48	83.52/83.56	80/82	90.02/90.05
( $P = 10 / 20$ )	2	22/22	51.26/51.35	57/57	76.84/76.89	99/98	85.75/85.78
( $P = 10 / 20$ )	2.5	26/27	40.66/40.74	67/67	70.2/70.26	114/114	81.34/81.38

		$T = 200 µ m$		$T = 300 µ m$		$T = 400 µ m$
Material	$f (µ m / r)$	$R_{T} (µ m)$	$η_{max} (%)$	$R_{T} (µ m)$	$η_{max} (%)$	$R_{T} (µ m)$	$η_{max} (%)$
ZnS	0.5	14	99.17	25	99.51	38	99.67
	1	22	97.93	39	98.79	57	99.17
	1.5	29	96.5	51	97.95	74	98.59
	2	35	94.95	61	97.02	90	97.95
	2.5	41	93.3	72	96.02	105	97.26
	0.5	18	99.09	31	99.47	44	99.64
	1	27	97.74	45	98.68	65	99.09
ZnSe	1.5	35	96.18	58	97.75	87	98.46
	2	44	94.47	73	96.73	107	97.76
	2.5	50	92.67	85	95.65	124	97
	0.5	43–49	98.5	78–81	99.13	104–132	99.4
	1	70–76	96.29	120–132	97.82	177–192	98.51
Ge	1.5	93–98	93.74	160–169	96.3	233–250	97.46
	2	113–118	90.98	193–204	94.63	281–303	96.3
	2.5	130–136	88.08	222–238	92.85	326–350	95.06

		$T = 100 µ m (p = 10) /$ $T = 200 µ m (p = 20)$		$T = 200 µ m (p = 10) /$ $T = 400 µ m (p = 20)$		$T = 300 µ m (p = 10) /$ $T = 600 µ m (p = 20)$
Material	$f (µ m / r)$	$R_{T} (µ m)$	$η_{max} (%)$	$R_{T} (µ m)$	$η_{max} (%)$	$R_{T} (µ m)$	$η_{max} (%)$
PMMA	0.5	10/9	89.83/89.9	24/24	95.88/95.89	39/39	97.58/97.58
	1	14/15	76.55/76.62	36/36	90/90.02	62/62	94.04/94.05
	1.5	19/19	63.37/63.44	48/48	83.52/83.56	80/82	90.02/90.05
( $P = 10 / 20$ )	2	22/22	51.26/51.35	57/57	76.84/76.89	99/98	85.75/85.78
( $P = 10 / 20$ )	2.5	26/27	40.66/40.74	67/67	70.2/70.26	114/114	81.34/81.38

		$T = 200 µ m$		$T = 300 µ m$		$T = 400 µ m$
Material	$f (µ m / r)$	$R_{T} (µ m)$	$η_{max} (%)$	$R_{T} (µ m)$	$η_{max} (%)$	$R_{T} (µ m)$	$η_{max} (%)$
ZnS	0.5	14	99.17	25	99.51	38	99.67
	1	22	97.93	39	98.79	57	99.17
	1.5	29	96.5	51	97.95	74	98.59
	2	35	94.95	61	97.02	90	97.95
	2.5	41	93.3	72	96.02	105	97.26
	0.5	18	99.09	31	99.47	44	99.64
	1	27	97.74	45	98.68	65	99.09
ZnSe	1.5	35	96.18	58	97.75	87	98.46
	2	44	94.47	73	96.73	107	97.76
	2.5	50	92.67	85	95.65	124	97
	0.5	43–49	98.5	78–81	99.13	104–132	99.4
	1	70–76	96.29	120–132	97.82	177–192	98.51
Ge	1.5	93–98	93.74	160–169	96.3	233–250	97.46
	2	113–118	90.98	193–204	94.63	281–303	96.3
	2.5	130–136	88.08	222–238	92.85	326–350	95.06

Abstract

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Applied Optics