Abstract

A nitridated ${\rm Ru}/{{\rm B}_4}{\rm C}$ multilayer with period of 3.0 nm and 80 bilayers were fabricated to study thermal and temporal stability. The multilayer was annealed from room temperature to 490°C, and the in situ X-ray measurements showed that the reflectivity remains mostly unchanged up to 300°C. An essential drop of the reflectivity occurred at 490°C with significantly increased interface roughness. A new layered structure with larger thickness than the original multilayer started to appear at 400°C. The nitridated ${\rm Ru}/{{\rm B}_4}{\rm C}$ multilayer remains intact after two years of storage in air, which demonstrated a very good temporal stability.

© 2019 Optical Society of America

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