Towards high-optical-strength, fluorine-resistant coatings for intracavity KrF laser optics

Vladimir Zvorykin; Radmir Gaynutdinov; Mikhail Isaev; Dmitry Stavrovskii; Dmitry Stavrovskii; Nikolai Ustinovskii

doi:10.1364/AO.378061

Applied Optics
Vol. 59,
Issue 5,
pp. A198-A205
(2020)
•https://doi.org/10.1364/AO.378061

Towards high-optical-strength, fluorine-resistant coatings for intracavity KrF laser optics

Vladimir Zvorykin, Radmir Gaynutdinov, Mikhail Isaev, Dmitry Stavrovskii, and Nikolai Ustinovskii

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Vladimir Zvorykin, Radmir Gaynutdinov, Mikhail Isaev, Dmitry Stavrovskii, and Nikolai Ustinovskii, "Towards high-optical-strength, fluorine-resistant coatings for intracavity KrF laser optics," Appl. Opt. 59, A198-A205 (2020)

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Table of Contents Category
- Lasers, Optical Amplifiers, and Laser Optics
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About this Article
History
- Original Manuscript: September 18, 2019
- Revised Manuscript: December 27, 2019
- Manuscript Accepted: December 28, 2019
- Published: January 30, 2020

Abstract

Intracavity optics of e-beam-pumped high-energy KrF lasers should survive in a hostile environment of simultaneous irradiation by intensive UV laser light, scattered electrons, bremsstrahlung X-ray radiation, and permanent etching by a fluorine-containing working gas mixture. The present paper is focused on the research and development of high-optical-strength and fluorine-resistant AR coatings capable of protecting the fused silica windows and HR rare mirrors of these lasers against fluorine attack. The most promising coatings deposited by e-beam evaporation were ${{\rm NdF}_3}$-based compositions, which have low water content, good resistance to fluorine, and demonstrated the highest damage thresholds for AR coatings ${29.8}\,\,{{\rm J/cm}^2}$ in a large irradiation spot. Outstanding “water-free” coatings of ${{\rm MgF}_2}$ and ${{\rm Al}_2}{{\rm O}_3}$ were deposited by ${{\rm CO}_2}$ laser evaporation with preliminary laser treatment of substrates.

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#	Type; Optical Thickness nd	Deposition Method	Deposition Rate, Å/s	Refraction Index $n$	Scattering $β$ , %
					Initial	After Etching
Single Layers
1	${M g F}_{2}$ ; $3 λ / 4$	e-beam	4.5	1.395	0.06	0.06
2	${M g F}_{2}$ ; $3 λ / 4$	laser	3.7	1.39	0.06	0.06
3	${M g F}_{2}$ ; $3 λ / 4$	laser+heating	3.7	1.383	0.06	0.09
4	${A l}_{2} O_{3}$ ; $3 λ / 4$	laser	2.4	1.59	0.06	0.11
5	${A l}_{2} O_{3}$ ; $3 λ / 4$	laser+heating	2.4	1.63	0.14	0.20
6	${M g F}_{2}$ (90%) + ${A l F}_{3}$ (10%); $λ / 4$	e-beam	4.5	1.373	0.035	0.06
7	${M g F}_{2}$ (90%) + ${A l F}_{3}$ (10%); $λ / 2$	e-beam	4.5	1.363	0.035	0.05
8	${M g F}_{2}$ (90%) + ${A l F}_{3}$ (10%); $3 λ / 4$	e-beam	4.8	1.385	0.035	0.05
9	${N d F}_{3}$ ; $λ / 4$	e-beam	5	1.557	0.015	0.09
10	${N d F}_{3}$ ; $λ / 2$	e-beam	8	1.578	0.015	0.08
11	${N d F}_{3}$ ; $3 λ / 4$	e-beam	7	1.576	0.015	0.10
12	${L a F}_{3}$ ; $λ / 2$	thermal	3	1.548	0.2
13	${L a F}_{3}$ ; $λ / 2$	thermal+ heating	3	1.55	0.1
AR coatings
14	${N d F}_{3} / {M g F}_{2}$	e-beam	5/7		0.015	0.09
15	${A l}_{2} O_{3} / {M g F}_{2}$	e-beam	5/9		0.04	0.11
16	${S c}_{2} O_{3} / {N d F}_{3}$	e-beam			0.06
HR coatings
17	$({S c}_{2} O_{3} / {N d F}_{3})^{N}$ ${S c}_{2} O_{3} +$ $λ / 2$ ${N d F}_{3}$ ; $N = 38$	e-beam			0.055	0.085
18	$({S c}_{2} O_{3} / {M g F}_{2})^{N}$ ${S c}_{2} O_{3} +$ $λ / 2$ ${M g F}_{2}$ ; $N = 24$	e-beam			0.05	0.07

Substrate	Coating	$F_{t h - 30}$ , $J / {c m}^{2}$	$F_{t h - 1}$ , $J / {c m}^{2}$	$F_{t h - L}$ , $J / {c m}^{2}$
HR
${S i O}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	3.7	5.0	16.5
${S i O}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	4.3	4.0	18.4
${S i O}_{2}$	${S c}_{2} O_{3} / {N d F}_{3}$	8.7	10.0	14.3
${C a F}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	4.3	6.5
${C a F}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	3.8	4.0	16.5
${S i O}_{2}$	${H f O}_{2} / {S i O}_{2}$	3.4	2.8	14.3
${S i O}_{2}$	${H f O}_{2} / {S i O}_{2}$	3.5	3.3	13.0
AR
${S i O}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	3.4	2.0
${S i O}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	2.6		8.9
${S i O}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	2.7
${S i O}_{2}$	${N d F}_{3} / {M g F}_{2}$	23.0	9.0	29.8
${S i O}_{2}$	${H f O}_{2} / {S i O}_{2}$	6.9	3.5	12.2
${S i O}_{2}$	${H f O}_{2} / {S i O}_{2}$	4.8	4.0	10.9
${S i O}_{2}$	${H f O}_{2} / {S i O}_{2}$	4.1	4.2
${C a F}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	2.6		9.4
${C a F}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	2.0
Uncoated substrates
${S i O}_{2}$ high-polished				37
${S i O}_{2}$ usual grade		23		29
${M g F}_{2}$				70
${C a F}_{2}$		$> 23$		60
${A l}_{2} O_{3}$		5.0		23

#	Type; Optical Thickness nd	Deposition Method	Deposition Rate, Å/s	Refraction Index $n$	Scattering $β$ , %
					Initial	After Etching
Single Layers
1	${M g F}_{2}$ ; $3 λ / 4$	e-beam	4.5	1.395	0.06	0.06
2	${M g F}_{2}$ ; $3 λ / 4$	laser	3.7	1.39	0.06	0.06
3	${M g F}_{2}$ ; $3 λ / 4$	laser+heating	3.7	1.383	0.06	0.09
4	${A l}_{2} O_{3}$ ; $3 λ / 4$	laser	2.4	1.59	0.06	0.11
5	${A l}_{2} O_{3}$ ; $3 λ / 4$	laser+heating	2.4	1.63	0.14	0.20
6	${M g F}_{2}$ (90%) + ${A l F}_{3}$ (10%); $λ / 4$	e-beam	4.5	1.373	0.035	0.06
7	${M g F}_{2}$ (90%) + ${A l F}_{3}$ (10%); $λ / 2$	e-beam	4.5	1.363	0.035	0.05
8	${M g F}_{2}$ (90%) + ${A l F}_{3}$ (10%); $3 λ / 4$	e-beam	4.8	1.385	0.035	0.05
9	${N d F}_{3}$ ; $λ / 4$	e-beam	5	1.557	0.015	0.09
10	${N d F}_{3}$ ; $λ / 2$	e-beam	8	1.578	0.015	0.08
11	${N d F}_{3}$ ; $3 λ / 4$	e-beam	7	1.576	0.015	0.10
12	${L a F}_{3}$ ; $λ / 2$	thermal	3	1.548	0.2
13	${L a F}_{3}$ ; $λ / 2$	thermal+ heating	3	1.55	0.1
AR coatings
14	${N d F}_{3} / {M g F}_{2}$	e-beam	5/7		0.015	0.09
15	${A l}_{2} O_{3} / {M g F}_{2}$	e-beam	5/9		0.04	0.11
16	${S c}_{2} O_{3} / {N d F}_{3}$	e-beam			0.06
HR coatings
17	$({S c}_{2} O_{3} / {N d F}_{3})^{N}$ ${S c}_{2} O_{3} +$ $λ / 2$ ${N d F}_{3}$ ; $N = 38$	e-beam			0.055	0.085
18	$({S c}_{2} O_{3} / {M g F}_{2})^{N}$ ${S c}_{2} O_{3} +$ $λ / 2$ ${M g F}_{2}$ ; $N = 24$	e-beam			0.05	0.07

Substrate	Coating	$F_{t h - 30}$ , $J / {c m}^{2}$	$F_{t h - 1}$ , $J / {c m}^{2}$	$F_{t h - L}$ , $J / {c m}^{2}$
HR
${S i O}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	3.7	5.0	16.5
${S i O}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	4.3	4.0	18.4
${S i O}_{2}$	${S c}_{2} O_{3} / {N d F}_{3}$	8.7	10.0	14.3
${C a F}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	4.3	6.5
${C a F}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	3.8	4.0	16.5
${S i O}_{2}$	${H f O}_{2} / {S i O}_{2}$	3.4	2.8	14.3
${S i O}_{2}$	${H f O}_{2} / {S i O}_{2}$	3.5	3.3	13.0
AR
${S i O}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	3.4	2.0
${S i O}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	2.6		8.9
${S i O}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	2.7
${S i O}_{2}$	${N d F}_{3} / {M g F}_{2}$	23.0	9.0	29.8
${S i O}_{2}$	${H f O}_{2} / {S i O}_{2}$	6.9	3.5	12.2
${S i O}_{2}$	${H f O}_{2} / {S i O}_{2}$	4.8	4.0	10.9
${S i O}_{2}$	${H f O}_{2} / {S i O}_{2}$	4.1	4.2
${C a F}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	2.6		9.4
${C a F}_{2}$	${S c}_{2} O_{3} / {M g F}_{2}$	2.0
Uncoated substrates
${S i O}_{2}$ high-polished				37
${S i O}_{2}$ usual grade		23		29
${M g F}_{2}$				70
${C a F}_{2}$		$> 23$		60
${A l}_{2} O_{3}$		5.0		23

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Applied Optics