Differential confocal measurement for surface topography with microstructures based on spiral scanning and wavelet filter

Jiale Wang; Yuguo Cui; Dan Liang; Yiqiang Wang; Ronghui Ying

doi:10.1364/AO.408652

Applied Optics
Vol. 59,
Issue 36,
pp. 11359-11370
(2020)
•https://doi.org/10.1364/AO.408652

Differential confocal measurement for surface topography with microstructures based on spiral scanning and wavelet filter

Jiale Wang, Yuguo Cui, Dan Liang, Yiqiang Wang, and Ronghui Ying

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Jiale Wang, Yuguo Cui, Dan Liang, Yiqiang Wang, and Ronghui Ying, "Differential confocal measurement for surface topography with microstructures based on spiral scanning and wavelet filter," Appl. Opt. 59, 11359-11370 (2020)

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- Instrumentation and Measurements
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About this Article
History
- Original Manuscript: August 27, 2020
- Revised Manuscript: November 22, 2020
- Manuscript Accepted: November 23, 2020
- Published: December 17, 2020

Abstract

This paper proposes a novel spiral-scanning laser differential confocal measurement method (SSLDCM) for fast and precise measurement of surface topography with microstructures. Spiral plane scanning is used to eliminate frequent acceleration and deceleration problems in traditional raster-scanning differential confocal measurement systems and helps to keep the measuring process efficient and stable. To solve the problem of uneven sampling distribution during spiral scanning, a variable sampling rate method is adopted to distribute the sampling points at equal intervals, which would help to reduce the time of the 3D imaging process. A denoising method based on an adaptive wavelet threshold is proposed to filter the existing noise during the measuring process. An experimental measurement platform based on SSLDCM is constructed, and the axial response curve is tested and analyzed. The linear region range of the experimental platform reaches 13 µm, and the slope is about 164.15 mV/µm. In addition, the measurement results of a silicon wafer specimen by SSLDCM show good consistency with a commercial high-precision microscope, and the largest deviation is less than 2.71%. The SSLDCM has great potential to be used in various noncontact surface measurement applications with high efficiency and accuracy.

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Number of Curve	1	2	3	4	5	6	7	8	Mean	Standard Deviation
Slope (mV/µm)	163.21	165.43	166.02	165.11	164.77	164.06	162.21	162.42	164.15	1.31
Zero-crossing point (µm)	–0.12	0.07	–0.11	–0.18	–0.11	0	0.13	0.25	–0.01	0.15

Sampling parameters	Radial sampling interval (µm)	1.5
	Outermost circumferential sampling interval (µm)	1.5
	Max sampling rate	800
Linear motion	Speed (µm/s)	0.7
Linear motion	Acceleration ( $m m / s^{2}$ )	0.1024
Rotational motion	Speed (rad/s)	3
Rotational motion	Acceleration ( $r a d / s^{2}$ )	5.0127

Sampling parameters	Sampling interval (µm)	1.5
Sampling parameters	Sampling rate	67
Linear motion	Speed (µm/s)	100
Linear motion	Acceleration ( $m m / s^{2}$ )	0.1024

	$U_{s t}$ (µm)	$L_{s t}$ (µm)	$h_{s}$ (µm)	$w_{s}$ (µm)	$l_{s}$ (µm)
Original waveform	0.36	0.37	10.28	10.35	250.84
Low-pass	0.27	0.28	10.28	10.34	250.83
Wavelet threshold	0.21	0.23	10.27	10.33	250.83
Adaptive wavelet threshold denoising	0.15	0.18	10.27	10.33	250.83

	Height (µm)	Step Period (µm)	Incline Width (µm)
Commercial microscope	10.41	249.07	10.61
SSLDCM system	10.27	250.83	10.33
Deviation ratio	1.36%	0.70%	2.71%

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