Abstract

We describe a monolithic approach to fabricating large-scale arrays of high-finesse and low-mode-volume Fabry–Perot microcavities with open access to the air core. A stress-driven buckling self-assembly technique was used to form half-symmetric curved-mirror cavities, and a dry etching process was subsequently used to create micropores through the upper mirror. We show that the cavities retain excellent optical properties, with reflectance-limited finesse ${\sim} {{2500}}$ and highly predictable Laguerre–Gaussian modes. We furthermore demonstrate the ability to introduce liquids into the cavity region by microinjection through the pores. Applications in sensing, optofluidics, and cavity quantum electrodynamics are envisioned.

© 2020 Optical Society of America

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