Abstract

We describe a monolithic approach to fabricating large-scale arrays of high-finesse and low-mode-volume Fabry–Perot microcavities with open access to the air core. A stress-driven buckling self-assembly technique was used to form half-symmetric curved-mirror cavities, and a dry etching process was subsequently used to create micropores through the upper mirror. We show that the cavities retain excellent optical properties, with reflectance-limited finesse ${\sim} {{2500}}$ and highly predictable Laguerre–Gaussian modes. We furthermore demonstrate the ability to introduce liquids into the cavity region by microinjection through the pores. Applications in sensing, optofluidics, and cavity quantum electrodynamics are envisioned.

© 2020 Optical Society of America

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Supplementary Material (2)

NameDescription
Visualization 1       The video clip shows a sequence of 4 droplets of hexane being dispensed onto an open-access microcavity, with rapid evaporation of the hexane in between. The cavity is excited by a fixed wavelength laser and exhibits distinct transitions between two
Visualization 2       The video clip shows an open access microcavity immersed in isopropyl alcohol, which is gradually evaporating. The microcavity is excited by a fixed laser which has been tuned to excite the fundamental resonant mode. This mode is only supported wh

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