Abstract

We present a performance analysis of compact monolithic optomechanical inertial sensors that describes their key fundamental limits and overall acceleration noise floor. Performance simulations for low-frequency gravity-sensitive inertial sensors show attainable acceleration noise floors on the order of $1 \times {10^{- 11}}\;{\rm m}/{{\rm s}^2}\sqrt {{\rm Hz}}$. Furthermore, from our performance models, we devised an optimization approach for our sensor designs, sensitivity, and bandwidth trade space. We conducted characterization measurements of these compact mechanical resonators, demonstrating $\textit{mQ}$-products at levels of 250 kg, which highlight their exquisite acceleration sensitivity.

© 2020 Optical Society of America

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