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Sensor for dynamic focus control of a deformable mirror

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Abstract

We recently presented a novel unimorph deformable mirror which allows for dynamic focus shift with an actuation rate of 2 kHz. Such mirrors suffer from hysteresis and creep. Therefore, they have to be operated in closed-loop. For this purpose, we developed a defocus sensor based on an astigmatic detection system. In this paper, we present the sensor design and discuss its performance.

© 2020 Optical Society of America

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