Abstract

Five-layer antireflective coating for the visible and the infrared has been successfully fabricated by a solgel route on quartz substrate. The quarter-half-quarter multilayer structure with two buffer layers is optimized by the optical admittance approach. Mesoporous SiO2 film templated by an ethylene oxide-propylene oxide-ethylene oxide triblock copolymer is used as the top layer, and SiO2-TiO2 hybrid films are employed as the other layers. The grazing incidence small-angle x-ray scattering results indicate the ordered mesopores in the low-index SiO2 film, as well as the homogeneity of the SiO2-TiO2 hybrid films. Transmittance spectra are fitted to obtain film thicknesses and refractive indices, providing the main technological parameters for theory designs. A short heat-treatment step followed by a shock cooling process is introduced to suppress crack formation in film stacks. The transmittance of the obtained five-layer antireflective coating exceeds 99% at 500–700 nm, and the maximum value in the infrared region is 97.84% at 1100 nm. This work is a beneficial attempt to fabricate antireflective coatings with multilayer structure through the soft solgel route.

© 2019 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Postdeposition treatment of IBS coatings for UV applications with optimized thin-film stress properties

Martin Bischoff, Tobias Nowitzki, Oliver Voß, Steffen Wilbrandt, and Olaf Stenzel
Appl. Opt. 53(4) A212-A220 (2014)

Optical and interfacial layer properties of SiO2 films deposited on different substrates

Yugang Jiang, Huasong Liu, Lishuan Wang, Dandan Liu, Chenghui Jiang, Xinbin Cheng, Yaping Yang, and Yiqin Ji
Appl. Opt. 53(4) A83-A87 (2014)

Solgel derived tantalum pentoxide films as ultraviolet antireflective coatings for silicon

Timothy J. Rehg, J. Alberto Ochoa-Tapia, André Knoesen, and Brian G. Higgins
Appl. Opt. 28(24) 5215-5221 (1989)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (11)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription