Abstract

Fiber-optic Fabry–Perot pressure sensors based on silicon diaphragms of different thicknesses were fabricated using surface and bulk MEMS techniques in this study. The multi-beam interference resulting from multiple reflecting mirrors with the elastic deformation of the Fabry–Perot sensor was simulated by finite element analysis. The pressure sensitivities of the sensors with different diaphragm thicknesses and the relationship between the pressure and the wavelength shift were simulated. The simulation results were in good agreement with the test results. This study provides guidance for future sensor models and parameter design.

© 2019 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Optical MEMS pressure sensor based on Fabry-Perot interferometry

Ming Li, Ming Wang, and Hongpu Li
Opt. Express 14(4) 1497-1504 (2006)

Fiber-optic Fabry–Perot pressure sensor based on low-temperature co-fired ceramic technology for high-temperature applications

Jia Liu, Pinggang Jia, Huixin Zhang, Xiaodan Tian, Hao Liang, Yingping Hong, Ting Liang, Wenyi Liu, and Jijun Xiong
Appl. Opt. 57(15) 4211-4215 (2018)

Miniature fiber-optic pressure sensor with a polymer diaphragm

Edvard Cibula and Denis Ðonlagić
Appl. Opt. 44(14) 2736-2744 (2005)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription