Abstract

The wavelength-by-wavelength (point-by-point) inversion process consists of solving the ellipsometric equations for each wavelength of the considered spectrum regardless of the other points. It provides the refractive index (${n}$) and extinction coefficient (${k}$) of an unknown absorbing material inside a multilayer stack from ellipsometry measurements. A revision of the wavelength-by-wavelength ${n}/{k}$ extraction is presented to overcome its two main deficiencies, which are (i) multiple solution possibilities and (ii) lack of Kramers–Kronig consistency. In addition, from a given estimate of thickness value, the inversion process allows one to determine it more exactly.

© 2019 Optical Society of America

Full Article  |  PDF Article
More Like This
Inversion of ellipsometry data using constrained spline analysis

Mickaël Gilliot
Appl. Opt. 56(4) 1173-1182 (2017)

Semi-analytical method for n–k inversion of ellipsometry data

Mickaël Gilliot
Appl. Opt. 58(4) 800-805 (2019)

Kramers-Kronig-consistent optical functions of anisotropic crystals: generalized spectroscopic ellipsometry on pentacene

M. Dressel, B. Gompf, D. Faltermeier, A.K. Tripathi, J. Pflaum, and M. Schubert
Opt. Express 16(24) 19770-19778 (2008)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (32)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics