Abstract

Development of the waveguide grating antenna with high directionality is significantly important for the optical phased array. A Si3N4/Si dual-layer structure with the grating pattern on the Si3N4 layer is proposed to improve the directionality of the waveguide grating antenna. High directionality of more than 89% can be achieved, and the length of the waveguide grating antenna is longer than 4 mm.

© 2019 Optical Society of America

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