Abstract

In this paper, we propose a phase measurement method for interferograms with nonuniform phase shifts. First, we measure the phase shifts between consecutive interferograms. Second, we use these values to modify the spectrum of the interferogram data. Then, by analyzing this spectrum, we design a suitable phase-shifting algorithm (PSA) using the frequency transfer function formalism. Finally, we test our PSA with experimental data to estimate the surface of an aluminum thin film. Our result is better than those obtained using the Fourier transform method, the principal component analysis method, and the least-squares PSA.

© 2019 Optical Society of America

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